@inproceedings{Kok:2011Rx, author = "Kok, Angela and Hansen, Thor-Erik and Hansen, Trond Andreas and Lietaer, Nicolas and Anand, Summanwar and Kenney, Christopher and Hasi, Jasmine and Via, Cinzia da and Parker, Sherwood Ira", title = "{Fabrication of 3D Silicon Detectors}", doi = "10.22323/1.113.0022", booktitle = "Proceedings of 19th International Workshop on Vertex Detectors {\textemdash} PoS(VERTEX 2010)", year = 2011, volume = "113", pages = "022" }