@inproceedings{Schmitz:2015cV,
  author = "Schmitz, Jurriaan",
  title = "{State of the art in Microfabrication}",
  doi = "10.22323/1.213.0017",
  booktitle = "Proceedings of Technology and Instrumentation in Particle Physics 2014 {\textemdash} PoS(TIPP2014)",
  year = 2015,
  volume = "213",
  pages = "017"
}