@inproceedings{Mezi:2016Dv, author = "Mezi, Luca and Bollanti, Sarah and Flora, Francesco and Torre, Amalia", title = "{Enea Euv Discharge Produced Plasma Source: Diagnostics, Characterization And Applications}", doi = "10.22323/1.240.0125", booktitle = "Proceedings of 1st EPS conference on Plasma Diagnostics {\textemdash} PoS(ECPD2015)", year = 2016, volume = "240", pages = "125" }