@article{Mezi:2016Dv,
  author = "Mezi, Luca  and  Bollanti, Sarah  and  Flora, Francesco  and  Torre, Amalia",
  title = "{Enea Euv Discharge Produced Plasma Source: Diagnostics, Characterization And Applications}",
  doi = "10.22323/1.240.0125",
  journal = "PoS",
  year = 2016,
  volume = "ECPD2015",
  pages = "125"
}