@inproceedings{Moser:2013sz, author = "Moser, Hans-Günther", title = "{3D integration TSV}", doi = "10.22323/1.167.0024", booktitle = "Proceedings of The 21st International Workshop on Vertex Detectors {\textemdash} PoS(Vertex 2012)", year = 2013, volume = "167", pages = "024" }