@inproceedings{Chang:2014JB, author = "Chang, Yia-Chung and Xie, Huai-Yi", title = "{Efficient computation methods for 3D microscopic ellipsometry}", doi = "10.22323/1.202.0001", booktitle = "Proceedings of The 2013 International Workshop on Computational Science and Engineering {\textemdash} PoS(IWCSE2013)", year = 2014, volume = "202", pages = "001" }