@article{Chang:2014JB,
  author = "Chang, Yia-Chung  and  Xie, Huai-Yi",
  title = "{Efficient computation methods for 3D microscopic ellipsometry}",
  doi = "10.22323/1.202.0001",
  journal = "PoS",
  year = 2014,
  volume = "IWCSE2013",
  pages = "001"
}