@inproceedings{Ochi:20156L, author = "Ochi, Atsuhiko", title = "{Carbon Sputtering Technology for MPGD detectors}", doi = "10.22323/1.213.0351", booktitle = "Proceedings of Technology and Instrumentation in Particle Physics 2014 {\textemdash} PoS(TIPP2014)", year = 2015, volume = "213", pages = "351" }