PoS - Proceedings of Science
Volume 287 - The 25th International workshop on vertex detectors (Vertex 2016) - Session: New developments and detector R&D
Small pitch 3D devices
G.F. Dalla Betta,* R. Mendicino, D.M.S. Sultan, M. Boscardin, G. Giacomini, S. Ronchin, N. Zorzi, G. Darbo, M. Meschini, A. Messineo
*corresponding author
Full text: pdf
Pre-published on: May 26, 2017
Published on: August 03, 2017
3D sensors are a promising option for the innermost pixel layers at the High Luminosity LHC. However, the required very high hit-rate capabilities, increased pixel granularity, extreme radiation hardness, and reduced material budget call for a device downscale as compared to existing 3D sensors, involving smaller pitch (e.g., 50×50 or 25×100 μm2), shorter inter-electrode spacing (~30 μm), narrower electrodes (~5 μm), and reduced active thickness (~100 μm). The development of a new generation of 3D pixel sensors with these challenging features is under way by many research groups, in collaboration with processing facilities like FBK, CNM, and SINTEF. This paper talk will review the lessons learned from existing 3D detectors, and will address the main design and technological issues for small pitch 3D devices. Preliminary results from the electrical and functional characterization of the first prototypes will be reported and compared to TCAD simulations.
DOI: https://doi.org/10.22323/1.287.0028
How to cite

Metadata are provided both in "article" format (very similar to INSPIRE) as this helps creating very compact bibliographies which can be beneficial to authors and readers, and in "proceeding" format which is more detailed and complete.

Open Access
Creative Commons LicenseCopyright owned by the author(s) under the term of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.