PoS - Proceedings of Science
Volume 287 - The 25th International workshop on vertex detectors (Vertex 2016) - Session: Poster
Characterization of HV-CMOS detectors in BCD8 technology and of a controlled hybridization technique
E. Zaffaroni*, A. Andreazza, A. Castoldi, V. Ceriale, G. Chiodini, M. Citterio, M. Dalla, G. Darbo, G. Gariano, A. Gaudiello, C. Guazzoni, V. Liberali, S. Passadore, F. Ragusa, A. Rovani, E. Ruscino, C. Sbarra, H. Shrimali, A. Sidoti and A. Stabile
Full text: pdf
Pre-published on: February 28, 2017
Published on: August 03, 2017
Radiation detectors built in high-voltage and high-resistivity CMOS technology are an interesting option for the large area pixel-trackers sought for the upgrade of the Large Hadron Collider experiments.

A characterisation of the BCD8 technology by STMicroelectronics process has been performed to evaluate its suitability for the realisation of CMOS sensors with a depleted region of several tens of micrometer. Sensors featuring $50\times250$ $\mu \text{m}^2$ pixels on a 125 $\Omega$cm resistivity substrate have been characterized.

The response to ionizing radiation is tested using radioactive sources and an X-ray tune, reading out the detector with an external spectroscopy chain. Irradiation tests were performed up to proton fluences exceeding $5\cdot10^{15}$ $p/\text{cm}^2$ and they show the depletion and breakdown voltages increases with irradiation.

A hybridization process for capacitive coupling has been developed. Assemblies have been performed using the ATLAS FE-I4 readout ASIC and prototype CMOS sensors. Measurements show a planarity better than 1.5 $\mu$m peak-to-peak on the 5 mm length of the HV-CMOS chip. To evaluate more precisely the achievable uniformity dummy chips of FE-I4 sizes have been made on 6-inch wafers. The measurement of the 24 capacitors on each chip is expected to achieve a precise estimation of the real thickness uniformity. The goal is to achieve less then 10% variation on the glue thickness ($\sim 0.5$ $\mu$m).
DOI: https://doi.org/10.22323/1.287.0063
How to cite

Metadata are provided both in "article" format (very similar to INSPIRE) as this helps creating very compact bibliographies which can be beneficial to authors and readers, and in "proceeding" format which is more detailed and complete.

Open Access
Creative Commons LicenseCopyright owned by the author(s) under the term of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.