Calculation of capacitances of silicon micro-strip sensors with a two dimensional numerical solution of the Laplace's equation
2020 February 11
In this work the results obtained with a calculation, in lower order, of backplane and interstrip capacitances in planar silicon microstrip sensors is presented. The method is based on a numerical solution of the 2D Laplace equation by partitioning the device in one dimension while keeping the other dimension continuous. The validity of the two-dimensional algorithm is checked through a comparison with experimental measurements and TCAD simulation performed on Multi Geometry Strip Sensors (MSSD).