PoS - Proceedings of Science
Volume 420 - 10th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (Pixel2022) - CMOS Detectors
Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics
W. Snoeys*, G. Aglieri Rinella, A. Andronic, M. Antonelli, R. Baccomi, R. Ballabriga Sune, M. Barbero, P. Barrillon, J. Baudot, P. Becht, F. Benotto, S. Beolé, G. Bertolone, A. Besson, W. Bialas, G. Borghello, J. Braach, M.D. Buckland, S. Bugiel, E. Buschmann, P. Camerini, M. Campbell, F. Carnesecchi, L. Cecconi, E. Charbon, A. Chauhan, C. Colledani, G. Contin, D. Dannheim, K. Dort, J.P. de Melo, W. Deng, G. De Robertis, A. Di Mauro, A. Dorda Martin, A. Dorokhov, P. Dorosz, G. Eberwein, Z. El Bitar, X. Fang, A. Fenigstein, C. Ferrero, D. Fougeron, D. Gajanana, M. Goffe, L. Gonella, A. Grelli, V. Gromov, A. Habib, A. Haim, K. Hansen, J. Hasenbichler, H. Hillemanns, G.H. Hong, C. Hu, A. Isakov, K. Jaaskelainen, A. Junique, A. Kotliarov, I. Kremastiotis, F. Krizek, A. Kluge, R. Kluit, G. Kucharska, T. Kugathasan, Y. Kwon, P. La Rocca, L. Lautner, P.V. Leitao, B.H. Lim, F. Loddo, M. Mager, D. Marras, P. Martinengo, S. Masciocchi, S. Mathew, M.W. Menzel, F. Morel, B. Mulyanto, M. Münker, L. Musa, M. Nakamura, P. Pangaud, S. Perciballi, H. Pham, F. Piro, F. Prino, S. Rachevski, K. Rebane, C. Reckleben, F. Reidt, R. Ricci, R. Russo, I. Sanna, V. Sarritzu, U. Savino, D. Schledewitz, I. Sedgwick, H.K. Soltveit, S. Senyukov, J. Sonneveld, J. Soudier, J. Stachel, M. Suzuki, P. Svihra, M. Suljic, N. Takahashi, G. Termo, N. Tiltmann, E. Toledano, A. Triffiro, A. Turcato, G. Usai, I. Valin, A. Villani, J.B. Van Beelen, M.D. Vassilev, C. Vernieri, A. Vitkovskiy, Y. Wu, A. Yelkenci and A. Yuncuet al. (click to show)
Full text: pdf
Pre-published on: March 13, 2023
Published on: May 08, 2023
The long term goal of the CERN Experimental Physics Department R&D on monolithic sensors
is the development of sub-100nm CMOS sensors for high energy physics. The first technology
selected is the TPSCo 65nm CMOS imaging technology. A first submission MLR1 included
several small test chips with sensor and circuit prototypes and transistor test structures. One of
the main questions to be addressed was how to optimize the sensor in the presence of significant
in-pixel circuitry. In this paper this optimization is described as well as the experimental results
from the MLR1 run confirming its effectiveness. A second submission investigating wafer-scale
stitching has just been completed. This work has been carried out in strong synergy with the ITS3
upgrade of the ALICE experiment.
DOI: https://doi.org/10.22323/1.420.0083
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