Volume 167 -
The 21st International Workshop on Vertex Detectors (Vertex 2012) -
Session 4 R/D and device and detector simulation
“Scribing-Cleaving-Passivation” for High Energy Physics Silicon Sensors
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Published on:
2013 July 24
DOI: https://doi.org/10.22323/1.167.0020
Open Access
Copyright owned by the author(s) under the term of the Creative Commons Attribution-NonCommercial-ShareAlike.
Copyright owned by the author(s) under the term of the Creative Commons Attribution-NonCommercial-ShareAlike.