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Volume 167 - The 21st International Workshop on Vertex Detectors (Vertex 2012) - Session 4 R/D and device and detector simulation
“Scribing-Cleaving-Passivation” for High Energy Physics Silicon Sensors
M. Christophersen
Full text: pdf
Published on: 2013 July 24
DOI: https://doi.org/10.22323/1.167.0020
Open Access
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