Determination of Si wafer resistivity distributions by C-V measurements
A.J. Kordyasz*, M. Kowalczyk, W. Bednarek, L. Bardelli, L. Lavergne, J. Sarnecki, M. Kisielinski, A. Brzozowski, K. Pytel, J. Tarasiuk, P. Grabiec and A. Panas
Published on:
June 28, 2010
DOI: https://doi.org/10.22323/1.098.0016
How to cite
Metadata are provided both in "article" format (very similar to INSPIRE) as this helps creating
very compact bibliographies which can be beneficial to authors and
readers, and in "proceeding" format
which is more detailed and complete.