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Volume 098 - 9th International Conference on Large Scale Applications and Radiation Hardness of Semiconductor Detectors (RD09) - Thu 1 October Morning
Determination of Si wafer resistivity distributions by C-V measurements
A.J. Kordyasz,* M. Kowalczyk, W. Bednarek, L. Bardelli, L. Lavergne, J. Sarnecki, M. Kisielinski, A. Brzozowski, K. Pytel, J. Tarasiuk, P. Grabiec, A. Panas
*corresponding author
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Published on: 2010 June 28
DOI: https://doi.org/10.22323/1.098.0016
Open Access
Creative Commons LicenseCopyright owned by the author(s) under the term of the Creative Commons Attribution-NonCommercial-ShareAlike.